We present a simple test structure (derived from the CBCM technique proposed by Sylvester et al.) that enables the selective extraction of cross-coupling capacitance between arbitrary on-chip interconnects. We discuss the silicon implementation on a 0.18um CMOS process and report preliminary experimental results
Charge-based on-chip measurement technique for the selective extraction of cross-coupling capacitances
BOGLIOLO, ALESSANDRO;
2002
Abstract
We present a simple test structure (derived from the CBCM technique proposed by Sylvester et al.) that enables the selective extraction of cross-coupling capacitance between arbitrary on-chip interconnects. We discuss the silicon implementation on a 0.18um CMOS process and report preliminary experimental resultsFile in questo prodotto:
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